Patent Assignment
Reel/Frame 024648/0004
Assignment of Assignor's Interest
Recorded: 2010-07-08
Pages: 3
Assignor
YOSHIDA, TOMOHIKO
Executed: 2010-04-01
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Device Manufacturing Apparatus, Including Coolant Temperature Control, and Method of Manufacturing Device