Patent Assignment
Reel/Frame 024658/0153
Assignment of Assignor's Interest
Recorded: 2010-07-09
Pages: 3
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Sulfonium Salt, Resist Composition, and Patterning Process