Patent Assignment
Reel/Frame 024669/0329
Assignment of Assignor's Interest
Recorded: 2010-07-13
Pages: 3
Assignor
TSUJIKAWA, TAKURO
Executed: 2010-04-02
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Mark Position Detection Device and Mark Position Detection Method, Exposure Apparatus Using Same, and Device Manufacturing Method