Patent Assignment
Reel/Frame 024679/0067
Assignment of Assignor's Interest
Recorded: 2010-06-29
Pages: 2
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etch Process for Reducing Silicon Recess