Patent Assignment
Reel/Frame 024687/0436
Assignment of Assignor's Interest
Recorded: 2010-07-14
Pages: 6
Assignors
CHUANG, YUNG-HO
Executed: 2010-07-01
SOLARZ, RICHARD W.
Executed: 2010-06-28
SHAFER, DAVID R.
Executed: 2010-07-07
TSAI, BIN-MING BENJAMIN
Executed: 2010-06-28
BROWN, DAVID L.
Executed: 2010-07-07
Assignee
KLA-TENCOR CORPORATION
160 RIO ROBLES, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers