Patent Assignment
Reel/Frame 024690/0281
Assignment of Assignor's Interest
Recorded: 2010-07-15
Pages: 5
Assignors
LAYH, MICHAEL
Executed: 2010-07-08
DEGUENTHER, MARKUS
Executed: 2010-07-13
PATRA, MICHAEL
Executed: 2010-07-09
WANGLER, JOHANNES
Executed: 2010-07-09
MAUL, MANFRED
Executed: 2010-07-14
FIOLKA, DAMIAN
Executed: 2010-07-09
WEISS, GUNDULA
Executed: 2010-07-09
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithographic Projection Exposure Apparatus Having a Multi-Mirror Array with Temporal Stabilisation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.