Assignment of Assignor's Interest

Recorded: 2010-07-19 Pages: 3

Assignor

SINGER, WOLFGANG

Executed: 2006-05-30

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Oblique Mirror-Type Normal-Incidence Collector System for Light Sources, Particularly Euv Plasma Discharge Sources

Application: 12/823,403 →

Publication: US 2010/0259742

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.