Patent Assignment
Reel/Frame 024708/0050
Assignment of Assignor's Interest
Recorded: 2010-07-19
Pages: 6
Assignors
HUEBEL, ALEXANDER
Executed: 2010-04-16
MANGER, MATTHIAS
Executed: 2010-05-04
KLOSE, GERD
Executed: 2010-05-14
SCHELLHORN, UWE
Executed: 2010-04-14
ARNZ, MICHAEL
Executed: 2010-04-19
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, D-07745, GERMANY
Covered Property
(1)
Method for Calibrating a Specimen Stage of a Metrology System and Metrology System Comprising a Specimen Stage
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.