Patent Assignment
Reel/Frame 024729/0600
Assignment of Assignor's Interest
Recorded: 2010-07-23
Pages: 3
Assignors
NAKAHARADA, MASAHIRO
Executed: 2010-07-05
IIDA, NARUAKI
Executed: 2010-07-05
MORIKAWA, KATSUHIRO
Executed: 2010-07-05
ENOKIDA, SUGURU
Executed: 2010-07-05
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Transfer Method and Apparatus