Substrate transfer method and apparatus

1. A method of transferring a substrate between a first module and a second module using a substrate transfer apparatus,

wherein, in plan view, the first and second modules both face a transfer path, the transfer path extends substantially linearly in a Y-direction, and the second module is located on an imaginary extension in the Y-direction of the transfer path, and

wherein the substrate transfer apparatus includes: a moving base having a horizontal, Y-motion axis for moving the moving base in the Y-direction; and a substrate holding member mounted to the moving base via a horizontal, X-motion axis so as to move relative to the moving base to be in an advanced position and a retracted position relative to the moving base, via a θ-motion axis so as to turn about a vertical axis relative to the moving base, and via a Z-motion axis so at to move vertically relative to the moving base,

said method comprising:

transferring a substrate from the first module to the substrate holding member;

moving the moving base toward the second module by operating the Y-motion axis;

advancing the substrate holding member relative to the moving base by operating the X-motion axis, in order to place the holding member in the advanced position; and

turning the substrate holding member by operating the θ-motion axis to direct the X-motion axis in the Y-direction so as to orient the substrate holding member toward the second module if the first module and the second module are oriented to different directions;

vertically moving the substrate holding member by operating the Z-motion axis to position the substrate holding member at a level of the second module, if the first module and the second module are located at different levels;

judging whether a Y-motion axis operating time is longer than a longer one of a θ-motion axis operating time and a Z-motion axis operating time;

wherein if the Y-motion axis operating time is judged to be longer than the longer one of the θ-motion axis operating time and the Z-motion axis operating time, initiating the advancing of the substrate holding member by the X-motion axis upon completion of an operation of one of the θ-motion axis or the Z-motion axis having the longer operating time so that the X-motion axis operating time overlaps with the Y-motion axis operating time, and

if the Y-motion axis operating time is judged to be not longer than the longer one of the θ-motion axis operating time and the Z-motion axis operating time, initiating the advancing of the substrate holding member by the X-motion axis after completion of an operation of the Y-motion axis so that the X-motion axis operating time does not overlap with the Y-motion axis operating time, and

transferring the substrate from the substrate holding member placed in the advanced position to the second module with the X-motion axis and the Y-motion axis being parallel with each other.

2. The method according to claim 1 ,

wherein the

turning the substrate holding member by operating the θ-motion axis after the transferring of the substrate from the first module to the holding member, to orient the X-motion axis parallel to the Y-motion axis.

3. The method according to claim 2 , wherein the advancing of the holding member relative to the moving base by operating the X-motion axis is performed after completion of the turning of the substrate holding member by operating the θ-motion axis.

4. The method according to claim 1 ,

wherein the advancing of the holding member relative to the moving base by operating the X-motion axis is performed after the later one of completion of turning the substrate holding member by the θ-motion axis and completion of the vertical moving of the substrate holding member by the Z-motion axis.

5. A non-transitory storage medium storing a computer program for controlling a substrate apparatus, the computer program on the non-transient storage medium comprising instructions for:

transferring a substrate from a first module to a holding member, the holding member mounted on a moving base via a horizontal, X-motion axis so as to move relative to the moving base to be in an advanced position and a retracted position relative to the moving base, via a θ-motion axis so as to turn about a vertical axis relative to the moving base, and via a Z-motion axis so at to move vertically relative to the moving base;

moving the moving base having a horizontal, Y-motion axis for moving the moving base in the Y-direction along a transfer path toward a second module by operating in the Y-motion axis, wherein, when in plan view, the first and second modules both face a transfer path, the transfer path extends substantially linearly in Y-direction, and the second module is located on an imaginary extension in the Y-direction of the transfer path; and

when the moving base is moving toward the second module by operating in the Y-motion axis after transferring the substrate from the first module to the holding member:

advancing the holding member relative to the moving base by operating the X-motion axis to place the holding member in the advanced position;

turning the substrate holding member by operating the θ-motion axis to direct the X-motion axis in the Y-direction to orient the substrate holding member toward the second module when the first module and the second module are oriented in different directions;

moving the substrate holding member vertically by operating the Z-motion axis to position the substrate holding member at a level of the second module, when the first module and the second module are located at different levels;

judging whether a Y-motion axis operating time is longer than a longer one of a θ-motion axis operating time and a Z-motion axis operating time, and if the Y-motion axis operating time is judged to be longer than the longer one of the θ-motion axis operating time and the Z-motion axis operating time, initiating the advancing of the substrate holding member by the X-motion axis upon completion of an operation of one of the θ-motion axis or the Z-motion axis having the longer operating time so that the X-motion axis operating time overlaps with the Y-motion axis operating time, and if the Y-motion axis operating time is judged to be not longer than the longer one of the θ-motion axis operating time and the Z-motion axis operating time, initiating the advancing of the substrate holding member by the X-motion axis after completion of an operation of the Y-motion axis so that the X-motion axis operating time does not overlap with the Y-motion axis operating time; and

transferring the substrate from the substrate holding member placed in the advanced position to the second module, with the X-motion axis and the Y-motion axis being parallel with each other.

6. A non-transitory storage medium storing a computer program for controlling a substrate apparatus, the computer program on the non-transient storage medium comprising instructions for:

transferring a substrate from a first module to a holding member, the holding member mounted on a moving base via a horizontal, X-motion axis so as to move relative to the moving base to be in an advanced position and a retracted position relative to the moving base, via a θ-motion axis so as to turn about a vertical axis relative to the moving base, and via a Z-motion axis so at to move vertically relative to the moving base;

moving the moving base having a horizontal, Y-motion axis for moving the moving base in the Y-direction along a transfer path toward a second module by operating in the Y-motion axis, wherein, when in plan view, the first and second modules both face a transfer path, the transfer path extends substantially linearly in Y-direction, and the second module is located on an imaginary extension in the Y-direction of the transfer path; and

when the moving base is moving toward the second module by operating in the Y-motion axis after transferring the substrate from the first module to the holding member:

advancing the holding member relative to the moving base by operating the X-motion axis to place the holding member in the advanced position;

moving the substrate holding member vertically by operating the Z-motion axis to position the substrate holding member at a level of the second module, when the first module and the second module are located at different levels, and

judging whether a Y-motion axis operating time is longer than a longer one of a θ-motion axis operating time and a Z-motion axis operating time, and if the Y-motion axis operating time is judged to be longer than the longer one of the θ-motion axis operating time and the Z-motion axis operating time, initiating the advancing of the substrate holding member by the X-motion axis upon completion of an operation of one of the θ-motion axis or the Z-motion axis having the longer operating time so that the X-motion axis operating time overlaps with the Y-motion axis operating time, and if the Y-motion axis operating time is judged to be not longer than the longer one of the θ-motion axis operating time and the Z-motion axis operating time, initiating the advancing of the substrate holding member by the X-motion axis after completion of an operation of the Y-motion axis so that the X-motion axis operating time does not overlap with the Y-motion axis operating time; and

transferring the substrate from the substrate holding member placed in the advanced position to the second module, with the X-motion axis and the Y-motion axis being parallel with each other.

7. A substrate transfer apparatus for transferring a substrate between at least a first module and a second module comprising:

a moving base having a horizontal, Y-motion axis for moving the moving base in the Y-direction along a transfer path;

a holding member for holding a substrate, the holding member mounted on the moving base via a horizontal, X-motion axis so as to move relative to the moving base to be in an advanced position and a retracted position relative to the moving base, via a θ-motion axis so as to turn about a vertical axis relative to the moving base, and via a Z-motion axis so at to move vertically relative to the moving base; and

a controller for controlling movement of the substrate transfer apparatus;

wherein, when in plan view, the first and second modules both face a transfer path, the transfer path extends substantially linearly in Y-direction, and the second module is located on an imaginary extension in the Y-direction of the transfer path,

wherein when the moving base is moving toward the second module by operating in the Y-motion axis after transferring the substrate from the first module to the holding member, the controller:

advances the holding member relative to the moving base by operating the X-motion axis to place the holding member in the advanced position;

turns the substrate holding member by operating the θ-motion axis to direct the X-motion axis in the Y-direction to orient the substrate holding member toward the second module when the first module and the second module are oriented in different directions;

moves the substrate holding member vertically by operating the Z-motion axis to position the substrate holding member at a level of the second module, when the first module and the second module are located at different levels; and

judges whether a Y-motion axis operating time is longer than a longer one of a θ-motion axis operating time and a Z-motion axis operating time, and if the Y-motion axis operating time is judged to be longer than the longer one of the θ-motion axis operating time and the Z-motion axis operating time, initiates the advancing of the substrate holding member by the X-motion axis upon completion of an operation of one of the θ-motion axis or the Z-motion axis having the longer operating time so that the X-motion axis operating time overlaps with the Y-motion axis operating time, and if the Y-motion axis operating time is judged to be not longer than the longer one of the θ-motion axis operating time and the Z-motion axis operating time, initiates the advancing of the substrate holding member by the X-motion axis after completion of an operation of the Y-motion axis so that the X-motion axis operating time does not overlap with the Y-motion axis operating time; and

transfers the substrate from the substrate holding member placed in the advanced position to the second module, with the X-motion axis and the Y-motion axis being parallel with each other.

8. A coating and developing apparatus comprising:

a carrier block into which a carrier accommodating a plurality of substrates is loaded;

a processing block connected to the carrier block so as to allow a substrate to be transferred between the processing block and the carrier block, the processing block comprising a plurality of modules including at least coating module for applying a resist to the substrate and a developing module for developing the resist after being exposed;

an interface block for allowing a substrate to be transferred between the processing block and an exposure apparatus, and

a substrate transfer apparatus for transferring a substrate between at least the coating module and the developing module comprising:

a moving base having a horizontal, Y-motion axis for moving the moving base in the Y-direction along a transfer path;

a holding member for holding a substrate, the holding member mounted on the moving base via a horizontal, X-motion axis so as to move relative to the moving base to be in an advanced position and a retracted position relative to the moving base, via a θ-motion axis so as to turn about a vertical axis relative to the moving base, and via a Z-motion axis so at to move vertically relative to the moving base; and

a controller for controlling movement of the substrate transfer apparatus;

wherein, when in plan view, the coating module and the developing module both face a transfer path, the transfer path extends substantially linearly in Y-direction, and the developing module is located on an imaginary extension in the Y-direction of the transfer path,

wherein when the moving base is moving toward the developing module by operating in the Y-motion axis after transferring the substrate from the coating module to the holding member, the controller:

advances the holding member relative to the moving base by operating the X-motion axis to place the holding member in the advanced position;

turns the substrate holding member by operating the θ-motion axis to direct the X-motion axis in the Y-direction to orient the substrate holding member toward the developing module when the coating module and the developing module are oriented in different directions;

moves the substrate holding member vertically by operating the Z-motion axis to position the substrate holding member at a level of the developing module, when the coating module and the developing module are located at different levels; and

judges whether a Y-motion axis operating time is longer than a longer one of a θ-motion axis operating time and a Z-motion axis operating time, and if the Y-motion axis operating time is judged to be longer than the longer one of the θ-motion axis operating time and the Z-motion axis operating time, initiates the advancing of the substrate holding member by the X-motion axis upon completion of an operation of one of the θ-motion axis or the Z-motion axis having the longer operating time so that the X-motion axis operating time overlaps with the Y-motion axis operating time, and if the Y-motion axis operating time is judged to be not longer than the longer one of the θ-motion axis operating time and the Z-motion axis operating time, initiates the advancing of the substrate holding member by the X-motion axis after completion of an operation of the Y-motion axis so that the X-motion axis operating time does not overlap with the Y-motion axis operating time; and

transfers the substrate from the substrate holding member placed in the advanced position to the developing module, with the X-motion axis and the Y-motion axis being parallel with each other.