Patent Assignment
Reel/Frame 024749/0782
Assignment of Assignor's Interest
Recorded: 2010-07-23
Pages: 7
Assignors
EHM, DIRK HEINRICH
Executed: 2010-07-01
STORM, ARNOLD
Executed: 2010-07-01
MOORS, JOHANNES HUBERTUS JOSEPHINA
Executed: 2010-06-26
WOLSCHRIJN, BASTIAAN THEODOOR
Executed: 2010-06-11
STEIN, THOMAS
Executed: 2010-06-09
SLIGTE, EDWIN TE
Executed: 2010-07-01
Assignees
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
ASML NETHERLANDS B.V.
DE RUN 6501, 5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method for removing a contamination layer from an optical surface and arrangement therefor as well as a method for generating a cleaning gas and arrangement therefor
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.