Patent Assignment
Reel/Frame 024786/0702
Assignment of Assignor's Interest
Recorded: 2010-08-04
Pages: 3
Assignor
DEN BOEF, ARIE JEFFREY
Executed: 2010-07-30
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method of Overlay Measurement, Lithographic Apparatus, Inspection Apparatus, Processing Apparatus and Lithographic Processing Cell