Patent Assignment
Reel/Frame 024795/0225
Assignment of Assignor's Interest
Recorded: 2010-08-05
Pages: 4
Assignor
KOBAYASHI, YOSHIYUKI
Executed: 2010-07-20
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Positioning Method and Focus Ring Installation Method