Patent Assignment
Reel/Frame 024826/0427
Assignment of Assignor's Interest
Recorded: 2010-08-11
Pages: 2
Assignors
DHINDSA, RAJINDER
Executed: 2010-08-10
MARAKHATNOV, ALEXEI
Executed: 2010-08-10
BAILEY, ANDREW D., III
Executed: 2010-08-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Processing Chamber with Dual Axial Gas Injection and Exhaust