Patent Assignment
Reel/Frame 024834/0118
Assignment of Assignor's Interest
Recorded: 2010-08-13
Pages: 2
Assignors
SASAKI, TAKAFUMI
Executed: 2010-07-05
NAKASHIMA, SADAO
Executed: 2010-07-07
IMAI, YOSHINORI
Executed: 2010-07-05
KURIBAYASHI, KOEI
Executed: 2010-07-05
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME, CHIYODA-KU,, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus , Method of Manufacturing Semiconductor Device, and Method of Manufacturing Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.