Patent Assignment
Reel/Frame 024834/0298
Assignment of Assignor's Interest
Recorded: 2010-08-13
Pages: 4
Assignors
OGAWA, ARITO
Executed: 2010-07-06
HORII, SADAYOSHI
Executed: 2010-07-06
SATO, TAKETOSHI
Executed: 2010-07-06
ITATANI, HIDEHARU
Executed: 2010-07-06
MISE, NOBUYUKI
Executed: 2010-07-20
TONOMURA, OSAMU
Executed: 2010-07-23
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME, CHIYODA-KU,, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.