Assignment of Assignor's Interest

Recorded: 2010-08-17 Pages: 4

Assignors

FIOLKA, DAMIAN

Executed: 2005-01-25

SCHOLZ, AXEL

Executed: 2005-01-27

MAUL, MANFRED

Executed: 2005-01-24

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System and Polarizer for a Microlithographic Projection Exposure Apparatus

Patent: 7,847,920 →

Application: 11/703,259 →

Publication: US 2008/0239273

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.