Patent Assignment
Reel/Frame 024848/0508
Assignment of Assignor's Interest
Recorded: 2010-08-17
Pages: 3
Assignors
CHANG, CHING-HSU
Executed: 2010-08-11
WANG, HUNG-CHUN
Executed: 2010-08-11
LUO, BOREN
Executed: 2010-08-11
HUANG, WEN-CHUN
Executed: 2010-08-11
LIU, RU-GUN
Executed: 2010-08-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Extreme Ultraviolet Light (Euv) Photomasks, and Fabrication Methods Thereof