Patent Assignment
Reel/Frame 024861/0546
Assignment of Assignor's Interest
Recorded: 2010-08-19
Received: 2010-08-19
Pages: 10
Assignors
COUTU, ROGER R.
Executed: 2010-02-03
BECKER, JILL S.
Executed: 2010-02-05
MONSMA, DOUWE J.
Executed: 2010-02-27
Assignee
CAMBRIDGE NANOTECH, INC.
68 ROGERS STREET, CAMBRIDGE, MA, 02142, UNITED STATES
Covered Property
(1)
Plasma Atomic Layer Deposition System and Method
Application:
12/647,821 →