Patent Application
Utility
Small
App. No. 12/647,821
· Confirmation No. 2670
PLASMA ATOMIC LAYER DEPOSITION SYSTEM AND METHOD
Abandoned -- After Examiner's Answer or Board of Appeals Decision
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-06-28 | ABN |
Abandonment | 2 | View | |
| 2019-04-12 | APD1 |
Decision on Reconsideration - Denied | 8 | View | |
| 2019-03-21 | BDRR |
Request for Rehearing of Patent Board Decision | 7 | View | |
| 2019-03-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2019-01-22 | APDA |
Patent Board Decision - Examiner Affirmed | 13 | View | |
| 2017-12-28 | AP_DK_M |
Appeal Docketing Notice | 2 | View | |
| 2017-12-19 | APRB |
Reply Brief Filed | 9 | View | |
| 2017-12-19 | WFEE.APPEAL |
Certification and Transmittal of Appeal Forwarding Fee | 2 | View | |
| 2017-12-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2017-10-20 | APEA |
Examiner's Answer to Appeal Brief | 5 | View | |
| 2017-03-14 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2017-03-14 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2017-03-13 | AP.B |
Appeal Brief Filed | 5 | View | |
| 2017-03-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2017-03-10 | APBD |
Notice - Defective Appeal Brief | 3 | View | |
| 2017-02-08 | AP/A |
Amendment/Argument after Notice of Appeal | 1 | View | |
| 2017-02-08 | CLM |
Claims | 6 | View | |
| 2017-02-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2017-02-08 | N/AP |
Notice of Appeal Filed | 2 | View | |
| 2017-02-08 | AP.B |
Appeal Brief Filed | 34 | View | |
| 2017-02-08 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-02-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2017-02-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-11-10 | CTFR |
Final Rejection | 9 | View | |
| 2016-11-10 | 892 |
List of references cited by examiner | 1 | View | |
| 2016-11-10 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2016-07-22 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2016-07-22 | CLM |
Claims | 8 | View | |
| 2016-07-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2016-07-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-07-22 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-05-23 | CTNF |
Non-Final Rejection | 7 | View | |
| 2016-05-23 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2016-04-07 | CTAV |
Advisory Action (PTOL-303) | 4 | View | |
| 2016-04-07 | INTV.SUM.EX |
Examiner initiated interview summary (PTOL-413B) | 1 | View | |
| 2016-04-07 | 892 |
List of references cited by examiner | 1 | View | |
| 2016-04-07 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2016-04-07 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2016-04-07 | A.NE.AFCP.D |
After Final Consideration Program Decision | 1 | View | |
| 2016-04-07 | RCEX |
Request for Continued Examination (RCE) | 3 | View | |
| 2016-04-07 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2016-04-07 | CLM |
Claims | 13 | View | |
| 2016-04-07 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2016-04-07 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-04-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2016-04-07 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2016-04-07 | CLM |
Claims | 14 | View | |
| 2016-04-07 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2016-04-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-04-07 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2016-04-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-03-08 | A.NE.AFCP |
After Final Consideration Program Request | 2 | View | |
| 2016-03-08 | A.NE |
Response After Final Action | 1 | View | |
| 2016-03-08 | CLM |
Claims | 14 | View | |
| 2016-03-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2016-03-08 | XT/ |
Extension of Time | 2 | View | |
| 2016-03-08 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-03-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2016-03-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-02-05 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2016-02-05 | 892 |
List of references cited by examiner | 1 | View | |
| 2016-01-26 | INTV.SUM.EX |
Examiner initiated interview summary (PTOL-413B) | 2 | View | |
| 2016-01-06 | A.NE |
Response After Final Action | 1 | View | |
| 2016-01-06 | CLM |
Claims | 13 | View | |
| 2016-01-06 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2016-01-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-01-06 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2015-12-17 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2015-12-17 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2015-12-17 | A.NE.AFCP.D |
After Final Consideration Program Decision | 1 | View | |
| 2015-12-01 | INTV.SUM.APP |
Applicant Initiated Interview Summary (PTOL-413) | 3 | View | |
| 2015-11-25 | A.NE.AFCP |
After Final Consideration Program Request | 2 | View | |
| 2015-11-25 | A.NE |
Response After Final Action | 1 | View | |
| 2015-11-25 | CLM |
Claims | 13 | View | |
| 2015-11-25 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2015-11-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2015-11-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2015-10-08 | CTFR |
Final Rejection | 8 | View | |
| 2015-10-08 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2015-07-31 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2015-07-31 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2015-07-21 | PA.. |
Power of Attorney | 1 | View | |
| 2015-07-21 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 2 | View | |
| 2015-07-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2015-06-15 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2015-06-15 | CLM |
Claims | 13 | View | |
| 2015-06-15 | REM |
Applicant Arguments/Remarks Made in an Amendment | 8 | View | |
| 2015-06-15 | XT/ |
Extension of Time | 1 | View | |
| 2015-06-15 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2015-06-15 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2015-06-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2015-06-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2014-12-15 | CTNF |
Non-Final Rejection | 8 | View | |
| 2014-12-15 | 892 |
List of references cited by examiner | 1 | View | |
| 2014-12-15 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2013-12-23 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2013-12-23 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2013-12-23 | CLM |
Claims | 13 | View | |
| 2013-12-23 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2013-12-23 | XT/ |
Extension of Time | 1 | View | |
| 2013-12-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2013-12-23 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-12-23 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2013-12-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2013-06-21 | CTFR |
Final Rejection | 7 | View | |
| 2013-06-21 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2013-03-07 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2013-03-07 | CLM |
Claims | 9 | View | |
| 2013-03-07 | REM |
Applicant Arguments/Remarks Made in an Amendment | 8 | View | |
| 2013-03-07 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-03-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2013-03-07 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2013-03-07 | XT/ |
Extension of Time | 1 | View | |
| 2013-03-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2013-03-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2012-09-07 | CTNF |
Non-Final Rejection | 7 | View | |
| 2012-09-07 | 892 |
List of references cited by examiner | 1 | View | |
| 2012-09-07 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-09-07 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2012-09-07 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2012-09-07 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2012-06-21 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2012-05-03 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2012-05-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-05-03 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2012-04-03 | CTRS |
Requirement for Restriction/Election | 6 | View | |
| 2010-11-30 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2010-11-30 | FOR |
Foreign Reference | 32 | View | |
| 2010-11-30 | FOR |
Foreign Reference | 30 | View | |
| 2010-11-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2010-11-30 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2010-11-30 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2010-07-22 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2010-03-18 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-03-18 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2010-03-11 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 2 | View | |
| 2010-03-11 | OATH |
Oath or Declaration filed | 4 | View | |
| 2010-03-11 | PA.. |
Power of Attorney | 1 | View | |
| 2010-03-11 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2010-03-11 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 8 | View | |
| 2010-03-11 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2010-03-11 | DRW.NONBW |
Drawings-other than black and white line drawings | 22 | View | |
| 2010-03-11 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-03-11 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-03-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2010-03-11 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 2 | View | |
| 2010-03-11 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2010-01-15 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-01-15 | NTC.MISS.PRT |
Notice to File Missing Parts | 2 | View | |
| 2009-12-28 | TRNA |
Transmittal of New Application | 1 | View | |
| 2009-12-28 | ADS |
Application Data Sheet | 3 | View | |
| 2009-12-28 | SPEC |
Specification | 44 | View | |
| 2009-12-28 | CLM |
Claims | 8 | View | |
| 2009-12-28 | ABST |
Abstract | 1 | View | |
| 2009-12-28 | DRW.NONBW |
Drawings-other than black and white line drawings | 22 | View | |
| 2009-12-28 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-12-28 | 136A |
Authorization for Extension of Time all replies | 1 | View | |
| 2009-12-28 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2009-12-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 0001-01-03 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 0001-01-03 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
118/725
C23C16/45536
C23C16/4404
C23C16/4412
C23C16/45504
C23C16/45544
C23C16/45555
C23C16/45582
C23C16/458
C23C16/4583
Prosecution
- Examiner
- FORD, NATHAN K
- Art Unit
- 1716
- Customer No.
- 23308
- Docket No.
- 3521.330/8800.034
- Confirmation No.
- 2670
Publication
- Pub. No.
- US20100183825A1
- Pub. Date
- 2010-07-22
CORRECTIVE ASSIGNMENT TO CORRECT THE RECEIVING PARTY'S STATE OF INCORPORATION PREVIOUSLY RECORDED ON REEL 030203 FRAME 0829. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT OF ASSIGNOR'S INTEREST.
Recorded 2017-02-14
from
SILICON VALLEY BANK
RELEASE OF IP SECURITY INTEREST
Recorded 2012-12-28
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-08-19
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Quick Facts
- App. No.
- 12/647,821
- Filed
- 2009-12-28
- Pub. No.
- US20100183825A1
- Examiner
- FORD, NATHAN K
- Art Unit
- 1716
External Links