Security Agreement

Recorded: 2010-12-01 Received: 2010-12-01 Pages: 10

Assignor

CAMBRIDGE NANOTECH, INC.

Executed: 2010-08-31

Assignee

SILICON VALLEY BANK

275 GROVE STREET, SUITE 2-200, NEWTON, MA, 02466, UNITED STATES

Covered Properties (6)

Method and apparatus for precursor delivery

Application: 61/397,978 →

Ald Systems and Methods

PCT: PCTUS2010000590 ↗

Plasma Atomic Layer Deposition System and Method

Application: 12/647,821 →

System and Method for Thin Film Deposition

Application: 12/609,319 →

Reaction Chamber with Removable Liner

Application: 12/609,308 →

Vapor Deposition Systems and Methods

Application: 11/167,570 →

PCT: PCTUS2005022896 ↗