Method and apparatus for precursor delivery

Provisional Application Expired

	Code	Description	Pages	PDF
2010-07-22	`APP.FILE.REC`	Filing Receipt	3	View
2010-06-18	`TRNA`	Transmittal of New Application	3	View
2010-06-18	`SPEC`	Specification	20	View
2010-06-18	`CLM`	Claims	3	View
2010-06-18	`ABST`	Abstract	1	View
2010-06-18	`DRW`	Drawings-only black and white line drawings	6	View
2010-06-18	`WFEE`	Fee Worksheet (SB06)	1	View

Inventors

Guo Liu Cambridge, MA

Adam Bertuch Cambridge, MA

Mark J. Sowa Cambridge, MA

Ritwik Bhatia Cambridge, MA

Eric W. Deguns Cambridge, MA

Mark J. Dalberth Cambridge, MA

Ganesh Sundarum Concord, MA

Jill S. Becker Cambridge, MA

Attorneys & Agents of Record

EDWARD KELLEY Reg. 41112 Agent · INVENTION MANAGEMENT ASSOCIATES INC.

Prosecution

SILICON VALLEY BANK

from CAMBRIDGE NANOTECH, INC.

SECURITY AGREEMENT Recorded 2010-12-01

Monitor This Case

Get email alerts when status or documents change.

Order Certified Copies

Most orders are placed with the USPTO same day — all within 24 business hours.

Pre-filled with this application's details

Quick Facts

External Links