Patent Assignment
Reel/Frame 030203/0829
Patent Assignment
Recorded: 2013-04-11
Received: 2013-04-11
Pages: 7
Assignor
CAMBRIDGE NANOTECH, INC.
Executed: 2012-12-18
Assignee
SURTEK, INC.
3050 ZANKER ROAD, SAN JOSE, CA, 95134, UNITED STATES
Covered Properties
(9)
Baking Pan
Application:
13/879,070 →
Vapor Deposition Systems and Methods
Application:
13/304,676 →
Ald Systems and Methods
Application:
13/203,602 →
Ald Coating System
Application:
13/273,417 →
PCT:
PCTUS2011056268 ↗
Method and Apparatus for Precursor Delivery
Application:
13/162,850 →
PCT:
PCTUS2011040862 ↗
Plasma Atomic Layer Deposition System and Method
Application:
12/647,821 →
System and Method for Thin Film Deposition
Application:
12/609,319 →
Reaction Chamber with Removable Liner
Application:
12/609,308 →
Vapor Deposition Systems and Methods
Application:
11/167,570 →