Patent Application
Provisional
Small
App. No. 61/204,072
· Confirmation No. 3811
Plasma assisted atomic layer deposition system and method
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2009-02-02 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-12-31 | TRNA |
Transmittal of New Application | 2 | View | |
| 2008-12-31 | SPEC |
Specification | 19 | View | |
| 2008-12-31 | ABST |
Abstract | 1 | View | |
| 2008-12-31 | DRW |
Drawings-only black and white line drawings | 18 | View | |
| 2008-12-31 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 42416
- Docket No.
- 0086-FIJI
- Confirmation No.
- 3811
Child
Claims priority from a provisional application
→
App. 12/647,821
Filed 2009-12-28
· Abandoned -- After Examiner's Answer or Board of Appeals Decision
Child
Claims priority from a provisional application
→
App. 15/277,096
Filed 2016-09-27
· Abandoned -- After Examiner's Answer or Board of Appeals Decision
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 61/204,072
- Filed
- 2008-12-31
External Links