Patent Assignment
Reel/Frame 024884/0315
Assignment of Assignor's Interest
Recorded: 2010-08-25
Pages: 3
Assignors
PAZIDIS, ALEXANDRA
Executed: 2010-07-05
ZACZEK, CHRISTOPH
Executed: 2010-06-15
FELDERMANN, HORST
Executed: 2010-06-25
HUBER, PETER
Executed: 2010-06-28
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Element for Reflection of Uv Radiation, Method for Manufacturing the Same and Projection Exposure Apparatus Comprising the Same
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.