Patent Assignment
Reel/Frame 024887/0534
Assignment of Assignor's Interest
Recorded: 2010-08-25
Pages: 4
Assignors
ALBAREDE, LUC
Executed: 2010-07-06
PAPE, ERIC
Executed: 2010-07-06
VENUGOPAL, VIJAYAKUMAR C.
Executed: 2010-07-06
CHOI, BRIAN D.
Executed: 2010-08-08
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Apparatus for Predictive Preventive Maintenance of Processing Chambers