Patent Assignment
Reel/Frame 024901/0085
Assignment of Assignor's Interest
Recorded: 2010-08-27
Pages: 4
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Fluid Handling Structure, Lithographic Apparatus and Device Manufacturing Method