Patent Assignment
Reel/Frame 024904/0800
Assignment of Assignor's Interest
Recorded: 2010-08-30
Pages: 3
Assignor
HIROKI, TSUTOMU
Executed: 2010-06-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Vacuum Processing Apparatus and Vacuum Transfer Apparatus