Patent Assignment
Reel/Frame 024916/0106
Assignment of Assignor's Interest
Recorded: 2010-08-31
Pages: 3
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Wafer Plane Detection of Lithographically Significant Contamination Photomask Defects