Patent Assignment
Reel/Frame 024934/0151
Assignment of Assignor's Interest
Recorded: 2010-09-02
Pages: 3
Assignor
ANPO, AKIHITO
Executed: 2010-08-19
Assignee
NUFLARE TECHNOLOGY, INC.
2068-3, OOKA, NUMAZU-SHI, SHIZUOKA, 410-8510, JAPAN
Covered Property
(1)
Charged Particle Beam Writing Method and Apparatus Therefor