Patent Assignment
Reel/Frame 024940/0021
Assignment of Assignor's Interest
Recorded: 2010-09-03
Pages: 4
Assignors
DE LA LLERA, ANTHONY
Executed: 2010-09-03
MANKIDY, PRATIK
Executed: 2010-09-03
KELLOGG, MICHAEL C.
Executed: 2010-09-03
DHINDSA, RAJINDER
Executed: 2010-09-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Showerhead Electrode