Patent Assignment
Reel/Frame 024974/0475
Assignment of Assignor's Interest
Recorded: 2010-09-13
Pages: 3
Assignors
PENG, YUNG-CHOW
Executed: 2010-08-16
HUANG, WEN-HUNG
Executed: 2010-08-12
LIN, YU-WEI
Executed: 2010-08-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Micro-Electro-Mechanical Systems (Mems), Systems, and Operating Methods Thereof