Patent Assignment
Reel/Frame 024986/0590
Assignment of Assignor's Interest
Recorded: 2010-09-14
Pages: 10
Assignors
FERNS, JASON
Executed: 2010-08-25
HENCH, JOHN J.
Executed: 2010-08-30
KOMAROV, SERGUEI
Executed: 2010-08-25
DZIURA, THADDEUS
Executed: 2010-08-04
Assignees
KLA - TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Method for Automated Determination of an Optimally Parameterized Scatterometry Model
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.