Patent Assignment
Reel/Frame 025001/0628
Assignment of Assignor's Interest
Recorded: 2010-09-16
Pages: 2
Assignors
SASAZAWA, HIDEAKI
Executed: 2010-05-11
HIROSE, TAKENORI
Executed: 2010-05-17
SERIKAWA, SHIGERU
Executed: 2010-05-13
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Method for Defect Determination in Fine Concave-Convex Pattern and Method for Defect Determination on Patterned Medium