Assignment of Assignor's Interest

Recorded: 2010-09-20 Pages: 5

Assignors

FIOLKA, DAMIAN

Executed: 2008-08-06

TOTZECK, MICHAEL

Executed: 2008-07-22

PAZIDIS, ALEXANDRA

Executed: 2008-07-24

RICKER, MICHAEL

Executed: 2008-08-08

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Microlithographic Projection Exposure Apparatus

Patent: 8,395,753 →

Application: 12/884,485 →

Publication: US 2011/0007293

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.