Patent Assignment
Reel/Frame 025018/0874
Assignment of Assignor's Interest
Recorded: 2010-09-21
Pages: 6
Assignors
DINGER, UDO
Executed: 2010-08-09
ENDRES, MARTIN
Executed: 2010-08-23
WERBER, ARMIN
Executed: 2010-09-20
MUEHLBERGER, NORBERT
Executed: 2010-08-10
BACH, FLORIAN
Executed: 2010-08-06
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMAN DEMOCRATIC REPUBLIC
Covered Property
(1)
Facet Mirror for Use in a Projection Exposure Apparatus for Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.