Patent Assignment
Reel/Frame 025050/0338
Assignment of Assignor's Interest
Recorded: 2010-09-28
Pages: 7
Assignors
MARTIN, PATRICK M.
Executed: 2010-09-16
CARLSON, STEVEN
Executed: 2010-09-16
PARK, JAMES W. (JUNG-WOOK)
Executed: 2010-09-27
OH, DANIEL (CHOONG-YOUNG)
Executed: 2010-09-27
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Method and System for Patterning a Substrate