Assignment of Assignor's Interest

Recorded: 2010-09-23 Pages: 3

Assignors

NAKAO, KEN

Executed: 2010-09-09

HARADA, MUNEO

Executed: 2010-09-09

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Film Forming Apparatus and Film Forming Method

Patent: 8,470,720 →

Application: 12/934,165 →

Publication: US 2011/0039420