Patent Assignment
Reel/Frame 025070/0759
Assignment of Assignor's Interest
Recorded: 2010-09-23
Pages: 2
Assignors
YANAGISAWA, YOSHIHIKO
Executed: 2010-09-06
TANABE, MITSURO
Executed: 2010-09-06
SAKUMA, HARUNOBU
Executed: 2010-09-07
TAKASAKI, TADASHI
Executed: 2010-09-10
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Semiconductor Devices Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.