Assignment of Assignor's Interest

Recorded: 2010-10-01 Pages: 4

Assignors

FIOLKA, DAMIAN

Executed: 2010-01-21

MUELLER, RALF

Executed: 2010-01-15

MAJOR, ANDRAS G.

Executed: 2010-01-15

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System of a Microlothographic Projection Exposure Apparatus

Patent: 9,013,680 →

Application: 12/836,436 →

Publication: US 2010/0277708

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.