Patent Assignment
Reel/Frame 025085/0357
Assignment of Assignor's Interest
Recorded: 2010-10-04
Pages: 2
Assignor
HERCHEN, HARALD
Executed: 2007-08-24
Assignee
SOKUDO CO., LTD.
K-I SHIJO BUILDING, 88 KANKOBOKO-CHO, SHIJODORI-MUROMACHI-HIGASHIIRU, SHIMOGYO-KU, KYOTO, 600-8009, JAPAN
Covered Property
(1)
Method and System for Controlling Bake Plate Temperature in a Semiconductor Processing Chamber
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.