Patent Assignment
Reel/Frame 025087/0624
Assignment of Assignor's Interest
Recorded: 2010-10-04
Pages: 3
Assignors
MUELLER, ULRICH
Executed: 2010-08-04
STUEHLER, JOACHIM
Executed: 2010-08-20
GROMER, OSWALD
Executed: 2010-08-04
FREIMANN, ROLF
Executed: 2010-08-05
KAUFMANN, PAUL
Executed: 2010-08-06
GEUPPERT, BERNHARD
Executed: 2010-08-04
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Exposure System for Microlithography with a Measurement Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.