Patent Assignment
Reel/Frame 025087/0765
Assignment of Assignor's Interest
Recorded: 2010-10-04
Pages: 4
Assignors
MINAMIDA, JUNYA
Executed: 2010-09-07
UEDA, ISSEI
Executed: 2010-09-10
CHOUNO, YASUHIRO
Executed: 2010-09-07
KURODA, OSAMU
Executed: 2010-09-10
ESHIMA, KAZUYOSHI
Executed: 2010-09-10
YOSHIDA, MASAHIRO
Executed: 2010-09-10
MORITA, SATOSHI
Executed: 2010-09-07
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus