Patent Assignment
Reel/Frame 025089/0375
Assignment of Assignor's Interest
Recorded: 2010-10-04
Pages: 4
Assignors
OZAKI, YUKIO
Executed: 2010-09-28
TAKAHATA, SATORU
Executed: 2010-09-28
NUNOMURA, ICHIRO
Executed: 2010-09-28
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Control Method of the Substrate Processing Apparatus, Manufacturing Method of Semiconductor Device and Apparatus State Shifting Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.