Patent Assignment
Reel/Frame 025099/0517
Assignment of Assignor's Interest
Recorded: 2010-10-06
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Illumination System for Euv Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.