Patent Assignment
Reel/Frame 025100/0243
Assignment of Assignor's Interest
Recorded: 2010-10-06
Pages: 5
Assignors
SMILDE, HENDRIK JAN HIDDE
Executed: 2010-09-14
BLEEKER, ARNO JAN
Executed: 2010-09-14
DEN BOEF, ARIE JEFFREY
Executed: 2010-09-14
KOOLEN, ARMAND EUGENE ALBERT
Executed: 2010-09-14
PELLEMANS, HENRICUS PETRUS MARIA
Executed: 2010-09-28
PLUG, REINDER TEUN
Executed: 2010-09-14
COENE, WILLEM MARIE JULIA MARCEL
Executed: 2010-09-14
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Metrology Method and Apparatus, Lithographic Apparatus, Device Manufacturing Method and Substrate