Patent Assignment
Reel/Frame 025108/0316
Assignment of Assignor's Interest
Recorded: 2010-10-07
Pages: 4
Assignors
TAYLOR, TRAVIS R.
Executed: 2010-09-08
SRINIVASAN, MUKUND
Executed: 2010-09-10
KADKHODAYAN, BOBBY
Executed: 2010-09-08
RAMANUJAM, K. Y.
Executed: 2010-09-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
High Lifetime Consumable Silicon Nitride-Silicon Dioxide Plasma Processing Components