Patent Assignment
Reel/Frame 025130/0113
Assignment of Assignor's Interest
Recorded: 2010-10-13
Pages: 5
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination Optics and Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.