Patent Assignment
Reel/Frame 025131/0395
Assignment of Assignor's Interest
Recorded: 2010-10-13
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, COLORADO, 94538
Covered Property
(1)
Edge-Clamped and Mechanically Fastened Inner Electrode of Showerhead Electrode Assembly