Patent Assignment
Reel/Frame 025153/0728
Assignment of Assignor's Interest
Recorded: 2010-10-18
Pages: 6
Assignors
ROGOJINA, ELENA
Executed: 2010-09-24
ROSENFELD, ERIC
Executed: 2010-09-24
POPLAVSKYY, DMITRY
Executed: 2010-09-24
Assignee
INNOVALIGHT, INC.
965 EAST ARQUES AVENUE, SUNNYVALE, CALIFORNIA, 94085
Covered Property
(1)
Methods of Etching Silicon-Containing Films on Silicon Substrates